Types of Products
High precision model
Measure various lenses with high accuracy
※ 3D map display
Measurement range ９０μ -５０ｍｍ
*Convex surface up to 50mm / Concave surface (including meniscus) up to 30mm
Measurable φ 10 - 100 mm
＊φ10 or less can be handled with a dedicated holder
3D map display
ΔH measurement function
Model for large lenses
A model specialized for large lenses such as for semiconductor lithography equipment
※No 3D map display
Measurement range １ｍｍ - １２０ｍｍ
Measurable φ ５０ｍ - ４００ｍｍ
High speed model
Higher speed than high accuracy *Currently under development
※No 3D map display
Measurement range ９０μ -５０ｍｍ
High-speed measurement specifications that the sample stage side moves up and down.
The sample uses a special holder
ΔH measurement function The sample uses a special holder
